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Buried refractive microlenses formed by selective oxidation of AlGaAs

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dc.contributor.authorWarren, M. E., author
dc.contributor.authorHou, H. Q., author
dc.contributor.authorLear, Kevin L., author
dc.contributor.authorBlum, O., author
dc.contributor.authorIEE, publisher
dc.date.accessioned2007-01-03T08:10:21Z
dc.date.available2007-01-03T08:10:21Z
dc.date.issued1996
dc.description.abstractThe authors demonstrate a novel method of fabricating buried refractive microlenses formed by selective oxidation of AlGaAs epitaxial layers on a GaAs substrate. By appropriate tailoring of the Al mole fraction in the vertical direction, a lens-shaped oxidation shape was achieved. Performance of the microlenses formed in this way was experimentally evaluated at 980nm, and modelled theoretically.
dc.format.mediumborn digital
dc.format.mediumarticles
dc.identifier.bibliographicCitationBlum, O., et al., Buried Refractive Microlenses Formed by Selective Oxidation of AlGaAs, Electronics Letters 32, no. 15 (18 July 1996): 1406-1408.
dc.identifier.urihttp://hdl.handle.net/10217/67865
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado State University. Libraries
dc.relation.ispartofFaculty Publications
dc.rights©1996 IEE.
dc.rightsCopyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.
dc.subjectoxidation
dc.subjectaluminium gallium arsenide
dc.titleBuried refractive microlenses formed by selective oxidation of AlGaAs
dc.typeText

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