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Damage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses

dc.contributor.authorArtioukov, I. A., author
dc.contributor.authorVinogradov, A. V., author
dc.contributor.authorKondratenko, V. V., author
dc.contributor.authorSevryukova, V. A., author
dc.contributor.authorVoronov, D. L., author
dc.contributor.authorZubarev, E. N., author
dc.contributor.authorPershyn, Yu. P., author
dc.contributor.authorRocca, Jorge J., author
dc.contributor.authorMenoni, C. S., author
dc.contributor.authorVaschenko, G., author
dc.contributor.authorGrisham, M., author
dc.contributor.authorOptical Society of America, publisher
dc.date.accessioned2007-01-03T08:10:18Z
dc.date.available2007-01-03T08:10:18Z
dc.date.issued2004
dc.description.abstractThe damage threshold and damage mechanism of extreme-ultraviolet Sc/Si multilayer mirror coatings are investigated with focused nanosecond pulses at 46.9-nm radiation from a compact capillary-discharge laser. Damage threshold fluences of ~0.08 J/cm2 are measured for coatings deposited on both borosilicate glass and Si substrates. The use of scanning and transmission electron microscopy and small-angle x-ray diffraction techniques reveals the thermal nature of the damage mechanism. The results are relevant to the use of newly developed high-flux extreme-ultraviolet sources in applications.
dc.format.mediumborn digital
dc.format.mediumarticles
dc.identifier.bibliographicCitationGrisham, M., et al., Damage to Extreme-Ultraviolet Sc/Si Multilayer Mirrors Exposed to Intense 46.9-nm Laser Pulses, Optics Letters 29, no. 6 (March 15, 2004): 620-622.
dc.identifier.urihttp://hdl.handle.net/10217/67841
dc.languageEnglish
dc.language.isoeng
dc.publisherColorado State University. Libraries
dc.relation.ispartofFaculty Publications
dc.rights©2004 Optical Society of America.
dc.rightsCopyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright.
dc.titleDamage to extreme-ultraviolet Sc/Si multilayer mirrors exposed to intense 46.9-nm laser pulses
dc.typeText

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