Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
| dc.contributor.author | Rocca, Jorge J., author | |
| dc.contributor.author | Menoni, C. S., author | |
| dc.contributor.author | Marconi, M. C., author | |
| dc.contributor.author | Capeluto, M. G., author | |
| dc.contributor.author | Wachulak, P. W., author | |
| dc.contributor.author | Optical Society of America, publisher | |
| dc.date.accessioned | 2007-01-03T08:10:06Z | |
| dc.date.available | 2007-01-03T08:10:06Z | |
| dc.date.issued | 2007 | |
| dc.description.abstract | Arrays of nanodots were directly patterned by interferometric lithography using a bright table-top 46.9 nm laser. Multiple exposures with a Lloyd's mirror interferometer allowed to print arrays of 60 nm FWHM features. This laser-based extreme ultraviolet interferometric technique makes possible to print different nanoscale patterns using a compact tabletop set up. | |
| dc.format.medium | born digital | |
| dc.format.medium | articles | |
| dc.identifier.bibliographicCitation | Capeluto, M. G., et al., Scanning Mechanism Based on a Programmable Liquid Crystal Display, Optics Express 15, no. 6 (March 19, 2007): 3465-3469. | |
| dc.identifier.uri | http://hdl.handle.net/10217/67583 | |
| dc.language | English | |
| dc.language.iso | eng | |
| dc.publisher | Colorado State University. Libraries | |
| dc.relation.ispartof | Faculty Publications | |
| dc.rights | ©2007 Optical Society of America. | |
| dc.rights | Copyright and other restrictions may apply. User is responsible for compliance with all applicable laws. For information about copyright law, please see https://libguides.colostate.edu/copyright. | |
| dc.title | Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography | |
| dc.type | Text |
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