Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium
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We report gain-saturated operation of a 13.2 nm tabletop laser in Ni-like Cd at a 5 Hz repetition rate. A gain–length product G×L=17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphirelaser pulses with an energy of only 1 J impinging at a grazing angle of 23°. With an average power of ~1 mW, this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.