Design of integrated on-chip impedance sensors
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In this thesis two integrated sensor systems for measuring the impedance of a device under test (DUT) are presented. Both sensors have potential applications in label-free affinity biosensors for biological and bio-medical analysis. The first sensor is a purely capacitive sensor that operates on the theory of capacitive division. Test capacitance is placed within a capacitive divider and produces an output voltage proportional to its value. This voltage is then converted to a timedomain signal for easy readout. The prototype capacitive sensor shows a resolution of 5 fF on a base of 500 fF, which ...