Highly coherent light at 13 nm generated by use of quasi-phase-matched high-harmonic generation

Attwood, D. T., author; Liu, Y., author; Bartels, R. A., author; Kapteyn, H. C., author; Murnane, M. M., author; Christov, I. P., author; Backus, S., author; Gagnon, E., author; Paul, A., author; Libertun, A. R., author; Zhang, X., author; Optical Society of America, publisher

Highly coherent light at 13 nm generated by use of quasi-phase-matched high-harmonic generation

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ECErab00012.pdf (540.7 KB)

Date

2004

Authors

Attwood, D. T., author

Liu, Y., author

Bartels, R. A., author

Kapteyn, H. C., author

Murnane, M. M., author

Christov, I. P., author

Backus, S., author

Gagnon, E., author

Paul, A., author

Libertun, A. R., author

Abstract

Young's double pinhole experiment, we demonstrate that quasi-phase-matched high-harmonic generation produces beams with very high spatial coherence at wavelengths around 13 nm. To our knowledge these are the highest spatial coherence values ever measured at such short wavelengths from any source without spatial filtering. This results in a practical, small-scale, coherent, extreme-ultraviolet source that is useful for applications in metrology, imaging, and microscopy.

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http://hdl.handle.net/10217/68041

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Highly coherent light at 13 nm generated by use of quasi-phase-matched high-harmonic generation

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