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Nano-imaging with compact extreme ultraviolet lasers

Date

2005

Authors

Kondratenko, V. V., author
Pershyn, Y. P., author
Artioukov, I. A., author
Vinogradov, A. V., author
Attwood, D. T., author
Anderson, E. H., author
Liddle, J. A., author
Chao, W., author
Rocca, Jorge J., author
Marconi, M. C., author

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Abstract

Recent advances in nanotechnology and nanoscience have created the need for new compact and practical imaging tools capable of resolving nanometer scale features. Although optical microscopy is unsurpassed in its versatility, the resolution of conventional optical microscopes is limited by the wavelength of the illuminating source to sizes that are typically larger than 200 nm.

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