Nanometer-scale ablation with a table-top soft x-ray laser

Parkinson, B., author; Lu, Y., author; Anderson, E. H., author; Attwood, D. T., author; Chao, W., author; Bloom, S., author; Hemberg, O., author; Rocca, Jorge J., author; Menoni, C. S., author; Etxarri, A. Garcia, author; Vaschenko, G., author; Optical Society of America, publisher

Nanometer-scale ablation with a table-top soft x-ray laser

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ECEjjr00084.pdf (367.55 KB)

Date

2006

Authors

Parkinson, B., author

Lu, Y., author

Anderson, E. H., author

Attwood, D. T., author

Chao, W., author

Bloom, S., author

Hemberg, O., author

Rocca, Jorge J., author

Menoni, C. S., author

Etxarri, A. Garcia, author

Abstract

Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.

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http://hdl.handle.net/10217/67609

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Nanometer-scale ablation with a table-top soft x-ray laser

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