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Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

Date

2006

Authors

Parkinson, B., author
Lu, Y., author
Rocca, Jorge J., author
Menoni, C. S., author
Marconi, M. C., author
Bartels, R. A., author
Wachulak, P. W., author
Optical Society of America, publisher

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Abstract

We report sub-400 nm spatial resolution with Gabor holography obtained using a highly coherent table top 46.9 nm laser. The hologram was recorded in high resolution photoresist and subsequently digitized with an atomic force microscope. The final image was numerically reconstructed with a Fresnel propagator. Optimal reconstruction parameters and quantification of spatial resolution were obtained with a wavelet analysis and image correlation.

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