%PDF-1.6
%
94 0 obj
<>
endobj
189 0 obj
<>stream
1998-02-20T09:15:54Z
IEEE Copyright
2007-12-21T10:44:53-07:00
2007-12-21T10:44:53-07:00
application/pdf
IEEE
Lithographic processing of polymers using plasma-generated electron beams - Plasma Science, IEEE Transactions on
Adobe Acrobat 8.0 Paper Capture Plug-in
uuid:4486bf78-23b8-4148-ae8d-eca409e76f74
uuid:d3c7a2f6-d80a-4a9a-b650-34af16bc3f28
endstream
endobj
89 0 obj
<>
endobj
95 0 obj
<>
endobj
96 0 obj
<>/Font<>/ProcSet[/PDF/Text/ImageB]>>/Type/Page>>
endobj
92 0 obj
<>
endobj
112 0 obj
<>stream
ACQ\4aCQa
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